Assembly Innovations: Air Bearings Aid Assembly of Flat Panel Displays
Motion errors of less than 10 microns can be expected from large-format air-bearing stages, but even that is not acceptable for some FPD processes.
Many manufacturing processes for flat panel displays (FPDs) require precision motion control for feature generation and inspection. Aerostatic bearings are an excellent choice for many of these processes, because they allow precise, repeatable motion; are clean-room compatible; and are maintenance-free.